3/18/2012	7:49:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	7:49:45 AM	Recipe started at 7:49 AM
3/18/2012	7:49:45 AM	Helium valve closed
3/18/2012	7:49:45 AM	H2 valve closed
3/18/2012	7:49:45 AM	BCl3 valve closed
3/18/2012	7:49:45 AM	PH3 valve closed
3/18/2012	7:49:45 AM	SiCl4 pre valve closed
3/18/2012	7:49:45 AM	SiCl4 post valve closed
3/18/2012	7:49:45 AM	Main Vac valve closed
3/18/2012	7:49:45 AM	Bypass valve closed
3/18/2012	7:49:45 AM	Bubbler valve closed
3/18/2012	7:49:45 AM	Helium MFC set to  0.000000
3/18/2012	7:49:45 AM	H2 MFC set to  0.000000
3/18/2012	7:49:45 AM	BCl3 MFC set to  0.000000
3/18/2012	7:49:45 AM	PH3 MFC set to  0.000000
3/18/2012	7:49:45 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:49:45 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:49:45 AM	Tube furnace set to 0
3/18/2012	7:49:48 AM	H2 valve closed
3/18/2012	7:49:48 AM	BCl3 valve closed
3/18/2012	7:49:48 AM	PH3 valve closed
3/18/2012	7:49:48 AM	SiCl4 pre valve closed
3/18/2012	7:49:48 AM	SiCl4 post valve closed
3/18/2012	7:49:48 AM	Main Vac valve closed
3/18/2012	7:49:48 AM	Bypass valve closed
3/18/2012	7:49:48 AM	Bubbler valve closed
3/18/2012	7:49:48 AM	Helium valve opened
3/18/2012	7:49:48 AM	Helium MFC set to  500.000000
3/18/2012	7:49:48 AM	H2 MFC set to  0.000000
3/18/2012	7:49:48 AM	BCl3 MFC set to  0.000000
3/18/2012	7:49:48 AM	PH3 MFC set to  0.000000
3/18/2012	7:49:48 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:49:48 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:49:48 AM	Tube furnace set to 0
3/18/2012	7:50:53 AM	Helium valve closed
3/18/2012	7:50:53 AM	H2 valve closed
3/18/2012	7:50:53 AM	BCl3 valve closed
3/18/2012	7:50:53 AM	PH3 valve closed
3/18/2012	7:50:53 AM	SiCl4 pre valve closed
3/18/2012	7:50:53 AM	SiCl4 post valve closed
3/18/2012	7:50:53 AM	Main Vac valve closed
3/18/2012	7:50:53 AM	Bypass valve closed
3/18/2012	7:50:53 AM	Bubbler valve closed
3/18/2012	7:50:53 AM	Helium MFC set to  0.000000
3/18/2012	7:50:53 AM	H2 MFC set to  0.000000
3/18/2012	7:50:53 AM	BCl3 MFC set to  0.000000
3/18/2012	7:50:53 AM	PH3 MFC set to  0.000000
3/18/2012	7:50:53 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:50:53 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:50:53 AM	Tube furnace set to 0
3/18/2012	7:50:54 AM	Run finished at 7:50 AM
3/18/2012	7:50:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	7:57:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	7:57:49 AM	Recipe started at 7:57 AM
3/18/2012	7:57:49 AM	Helium valve closed
3/18/2012	7:57:49 AM	H2 valve closed
3/18/2012	7:57:49 AM	BCl3 valve closed
3/18/2012	7:57:49 AM	PH3 valve closed
3/18/2012	7:57:49 AM	SiCl4 pre valve closed
3/18/2012	7:57:49 AM	SiCl4 post valve closed
3/18/2012	7:57:49 AM	Main Vac valve closed
3/18/2012	7:57:49 AM	Bubbler valve closed
3/18/2012	7:57:49 AM	Bypass valve opened
3/18/2012	7:57:49 AM	Helium MFC set to  0.000000
3/18/2012	7:57:49 AM	H2 MFC set to  0.000000
3/18/2012	7:57:49 AM	BCl3 MFC set to  0.000000
3/18/2012	7:57:49 AM	PH3 MFC set to  0.000000
3/18/2012	7:57:49 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:57:49 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:57:49 AM	Tube furnace set to 0
3/18/2012	7:58:48 AM	Helium valve closed
3/18/2012	7:58:48 AM	H2 valve closed
3/18/2012	7:58:48 AM	BCl3 valve closed
3/18/2012	7:58:48 AM	PH3 valve closed
3/18/2012	7:58:48 AM	SiCl4 pre valve closed
3/18/2012	7:58:48 AM	SiCl4 post valve closed
3/18/2012	7:58:48 AM	Main Vac valve closed
3/18/2012	7:58:48 AM	Bubbler valve closed
3/18/2012	7:58:48 AM	Bypass valve opened
3/18/2012	7:58:48 AM	Helium MFC set to  0.000000
3/18/2012	7:58:48 AM	H2 MFC set to  0.000000
3/18/2012	7:58:48 AM	BCl3 MFC set to  0.000000
3/18/2012	7:58:48 AM	PH3 MFC set to  0.000000
3/18/2012	7:58:48 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:58:48 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:58:48 AM	Tube furnace set to 0
3/18/2012	7:59:48 AM	Helium valve closed
3/18/2012	7:59:48 AM	H2 valve closed
3/18/2012	7:59:48 AM	BCl3 valve closed
3/18/2012	7:59:48 AM	PH3 valve closed
3/18/2012	7:59:48 AM	SiCl4 pre valve closed
3/18/2012	7:59:48 AM	SiCl4 post valve closed
3/18/2012	7:59:48 AM	Bypass valve closed
3/18/2012	7:59:48 AM	Bubbler valve closed
3/18/2012	7:59:48 AM	Main Vac valve opened
3/18/2012	7:59:48 AM	Helium MFC set to  0.000000
3/18/2012	7:59:48 AM	H2 MFC set to  0.000000
3/18/2012	7:59:48 AM	BCl3 MFC set to  0.000000
3/18/2012	7:59:48 AM	PH3 MFC set to  0.000000
3/18/2012	7:59:48 AM	SiCl4 MFC set to  0.000000
3/18/2012	7:59:48 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:59:49 AM	Tube furnace set to 0
3/18/2012	7:59:50 AM	Run finished at 7:59 AM
3/18/2012	7:59:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	8:03:20 AM	Recipe started at 8:03 AM
3/18/2012	8:03:21 AM	Helium valve closed
3/18/2012	8:03:21 AM	H2 valve closed
3/18/2012	8:03:21 AM	BCl3 valve closed
3/18/2012	8:03:21 AM	PH3 valve closed
3/18/2012	8:03:21 AM	SiCl4 pre valve closed
3/18/2012	8:03:21 AM	SiCl4 post valve closed
3/18/2012	8:03:21 AM	Bypass valve closed
3/18/2012	8:03:21 AM	Bubbler valve closed
3/18/2012	8:03:21 AM	Main Vac valve opened
3/18/2012	8:03:21 AM	Helium MFC set to  0.000000
3/18/2012	8:03:21 AM	H2 MFC set to  0.000000
3/18/2012	8:03:21 AM	BCl3 MFC set to  0.000000
3/18/2012	8:03:21 AM	PH3 MFC set to  0.000000
3/18/2012	8:03:21 AM	SiCl4 MFC set to  0.000000
3/18/2012	8:03:21 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	8:03:21 AM	Tube furnace set to 0
3/18/2012	10:03:21 AM	Helium valve closed
3/18/2012	10:03:21 AM	H2 valve closed
3/18/2012	10:03:21 AM	BCl3 valve closed
3/18/2012	10:03:21 AM	PH3 valve closed
3/18/2012	10:03:21 AM	SiCl4 pre valve closed
3/18/2012	10:03:21 AM	SiCl4 post valve closed
3/18/2012	10:03:21 AM	Main Vac valve closed
3/18/2012	10:03:21 AM	Bypass valve closed
3/18/2012	10:03:21 AM	Bubbler valve closed
3/18/2012	10:03:21 AM	Helium MFC set to  0.000000
3/18/2012	10:03:21 AM	H2 MFC set to  0.000000
3/18/2012	10:03:21 AM	BCl3 MFC set to  0.000000
3/18/2012	10:03:21 AM	PH3 MFC set to  0.000000
3/18/2012	10:03:21 AM	SiCl4 MFC set to  0.000000
3/18/2012	10:03:21 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:03:21 AM	Tube furnace set to 0
3/18/2012	10:03:24 AM	Helium valve closed
3/18/2012	10:03:24 AM	BCl3 valve closed
3/18/2012	10:03:24 AM	PH3 valve closed
3/18/2012	10:03:24 AM	SiCl4 pre valve closed
3/18/2012	10:03:24 AM	SiCl4 post valve closed
3/18/2012	10:03:24 AM	Main Vac valve closed
3/18/2012	10:03:24 AM	Bypass valve closed
3/18/2012	10:03:24 AM	Bubbler valve closed
3/18/2012	10:03:24 AM	H2 valve opened
3/18/2012	10:03:24 AM	Helium MFC set to  0.000000
3/18/2012	10:03:24 AM	H2 MFC set to  500.000000
3/18/2012	10:03:24 AM	BCl3 MFC set to  0.000000
3/18/2012	10:03:24 AM	PH3 MFC set to  0.000000
3/18/2012	10:03:24 AM	SiCl4 MFC set to  0.000000
3/18/2012	10:03:24 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:03:24 AM	Tube furnace set to 0
3/18/2012	10:04:33 AM	Helium valve closed
3/18/2012	10:04:33 AM	BCl3 valve closed
3/18/2012	10:04:33 AM	PH3 valve closed
3/18/2012	10:04:33 AM	SiCl4 pre valve closed
3/18/2012	10:04:33 AM	SiCl4 post valve closed
3/18/2012	10:04:33 AM	Main Vac valve closed
3/18/2012	10:04:33 AM	Bypass valve closed
3/18/2012	10:04:33 AM	H2 valve opened
3/18/2012	10:04:33 AM	Bubbler valve opened
3/18/2012	10:04:33 AM	Helium MFC set to  0.000000
3/18/2012	10:04:33 AM	H2 MFC set to  500.000000
3/18/2012	10:04:33 AM	BCl3 MFC set to  0.000000
3/18/2012	10:04:33 AM	PH3 MFC set to  0.000000
3/18/2012	10:04:33 AM	SiCl4 MFC set to  0.000000
3/18/2012	10:04:33 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:04:33 AM	Tube furnace set to 0
3/18/2012	10:04:34 AM	Helium valve closed
3/18/2012	10:04:34 AM	BCl3 valve closed
3/18/2012	10:04:34 AM	PH3 valve closed
3/18/2012	10:04:34 AM	SiCl4 pre valve closed
3/18/2012	10:04:34 AM	SiCl4 post valve closed
3/18/2012	10:04:34 AM	Main Vac valve closed
3/18/2012	10:04:34 AM	Bypass valve closed
3/18/2012	10:04:34 AM	H2 valve opened
3/18/2012	10:04:34 AM	Bubbler valve opened
3/18/2012	10:04:34 AM	Helium MFC set to  0.000000
3/18/2012	10:04:34 AM	H2 MFC set to  500.000000
3/18/2012	10:04:34 AM	BCl3 MFC set to  0.000000
3/18/2012	10:04:34 AM	PH3 MFC set to  0.000000
3/18/2012	10:04:34 AM	SiCl4 MFC set to  0.000000
3/18/2012	10:04:34 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:04:34 AM	Tube furnace set to 1000
3/18/2012	10:29:34 AM	Helium valve closed
3/18/2012	10:29:34 AM	PH3 valve closed
3/18/2012	10:29:34 AM	Main Vac valve closed
3/18/2012	10:29:34 AM	Bypass valve closed
3/18/2012	10:29:34 AM	H2 valve opened
3/18/2012	10:29:34 AM	BCl3 valve opened
3/18/2012	10:29:34 AM	SiCl4 pre valve opened
3/18/2012	10:29:34 AM	SiCl4 post valve opened
3/18/2012	10:29:34 AM	Bubbler valve opened
3/18/2012	10:29:34 AM	Helium MFC set to  0.000000
3/18/2012	10:29:34 AM	H2 MFC set to  450.000000
3/18/2012	10:29:34 AM	BCl3 MFC set to  1.500000
3/18/2012	10:29:34 AM	PH3 MFC set to  0.000000
3/18/2012	10:29:34 AM	SiCl4 MFC set to  50.000000
3/18/2012	10:29:34 AM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:29:34 AM	Tube furnace set to 1000
3/18/2012	10:29:34 AM	Helium valve closed
3/18/2012	10:29:34 AM	H2 valve closed
3/18/2012	10:29:34 AM	BCl3 valve closed
3/18/2012	10:29:34 AM	PH3 valve closed
3/18/2012	10:29:34 AM	SiCl4 pre valve closed
3/18/2012	10:29:34 AM	SiCl4 post valve closed
3/18/2012	10:29:35 AM	Main Vac valve closed
3/18/2012	10:29:35 AM	Bubbler valve closed
3/18/2012	10:29:35 AM	Bypass valve closed
3/18/2012	10:29:35 AM	Helium MFC set to  0.000000
3/18/2012	10:29:35 AM	H2 MFC set to  0.000000
3/18/2012	10:29:35 AM	BCl3 MFC set to  0.000000
3/18/2012	10:29:35 AM	PH3 MFC set to  0.000000
3/18/2012	10:29:35 AM	SiCl4 MFC set to  0.000000
3/18/2012	10:29:35 AM	Bypass solenoid MFC set to  760.000000
3/18/2012	10:29:35 AM	Tube furnace set to 0
3/18/2012	10:29:35 AM	Baratron reads 733.151697 Torr and NaOH valve is open.  Emergency exit.
3/18/2012	12:49:49 PM	Run aborted at 12:49 PM
3/18/2012	12:50:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	12:50:08 PM	Recipe started at 12:50 PM
3/18/2012	12:50:09 PM	Helium valve closed
3/18/2012	12:50:09 PM	H2 valve closed
3/18/2012	12:50:09 PM	BCl3 valve closed
3/18/2012	12:50:09 PM	PH3 valve closed
3/18/2012	12:50:09 PM	SiCl4 pre valve closed
3/18/2012	12:50:09 PM	SiCl4 post valve closed
3/18/2012	12:50:09 PM	Main Vac valve closed
3/18/2012	12:50:09 PM	Bypass valve closed
3/18/2012	12:50:09 PM	Bubbler valve closed
3/18/2012	12:50:09 PM	Helium MFC set to  0.000000
3/18/2012	12:50:09 PM	H2 MFC set to  0.000000
3/18/2012	12:50:09 PM	BCl3 MFC set to  0.000000
3/18/2012	12:50:09 PM	PH3 MFC set to  0.000000
3/18/2012	12:50:09 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:50:09 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:50:09 PM	Tube furnace set to 0
3/18/2012	12:50:12 PM	H2 valve closed
3/18/2012	12:50:12 PM	BCl3 valve closed
3/18/2012	12:50:12 PM	PH3 valve closed
3/18/2012	12:50:12 PM	SiCl4 pre valve closed
3/18/2012	12:50:12 PM	SiCl4 post valve closed
3/18/2012	12:50:12 PM	Main Vac valve closed
3/18/2012	12:50:12 PM	Bypass valve closed
3/18/2012	12:50:12 PM	Bubbler valve closed
3/18/2012	12:50:12 PM	Helium valve opened
3/18/2012	12:50:12 PM	Helium MFC set to  500.000000
3/18/2012	12:50:12 PM	H2 MFC set to  0.000000
3/18/2012	12:50:12 PM	BCl3 MFC set to  0.000000
3/18/2012	12:50:12 PM	PH3 MFC set to  0.000000
3/18/2012	12:50:12 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:50:12 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:50:12 PM	Tube furnace set to 0
3/18/2012	12:50:22 PM	Helium valve closed
3/18/2012	12:50:22 PM	H2 valve closed
3/18/2012	12:50:22 PM	BCl3 valve closed
3/18/2012	12:50:22 PM	PH3 valve closed
3/18/2012	12:50:22 PM	SiCl4 pre valve closed
3/18/2012	12:50:22 PM	SiCl4 post valve closed
3/18/2012	12:50:22 PM	Main Vac valve closed
3/18/2012	12:50:22 PM	Bypass valve closed
3/18/2012	12:50:22 PM	Bubbler valve closed
3/18/2012	12:50:22 PM	Helium MFC set to  0.000000
3/18/2012	12:50:22 PM	H2 MFC set to  0.000000
3/18/2012	12:50:22 PM	BCl3 MFC set to  0.000000
3/18/2012	12:50:22 PM	PH3 MFC set to  0.000000
3/18/2012	12:50:22 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:50:22 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:50:22 PM	Tube furnace set to 0
3/18/2012	12:50:23 PM	Run finished at 12:50 PM
3/18/2012	12:50:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	12:56:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	12:56:35 PM	Recipe started at 12:56 PM
3/18/2012	12:56:35 PM	Helium valve closed
3/18/2012	12:56:35 PM	H2 valve closed
3/18/2012	12:56:35 PM	BCl3 valve closed
3/18/2012	12:56:35 PM	PH3 valve closed
3/18/2012	12:56:35 PM	SiCl4 pre valve closed
3/18/2012	12:56:35 PM	SiCl4 post valve closed
3/18/2012	12:56:35 PM	Main Vac valve closed
3/18/2012	12:56:35 PM	Bubbler valve closed
3/18/2012	12:56:35 PM	Bypass valve opened
3/18/2012	12:56:35 PM	Helium MFC set to  0.000000
3/18/2012	12:56:35 PM	H2 MFC set to  0.000000
3/18/2012	12:56:35 PM	BCl3 MFC set to  0.000000
3/18/2012	12:56:35 PM	PH3 MFC set to  0.000000
3/18/2012	12:56:35 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:56:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:56:35 PM	Tube furnace set to 0
3/18/2012	12:57:31 PM	Helium valve closed
3/18/2012	12:57:31 PM	H2 valve closed
3/18/2012	12:57:31 PM	BCl3 valve closed
3/18/2012	12:57:31 PM	PH3 valve closed
3/18/2012	12:57:31 PM	SiCl4 pre valve closed
3/18/2012	12:57:31 PM	SiCl4 post valve closed
3/18/2012	12:57:31 PM	Main Vac valve closed
3/18/2012	12:57:31 PM	Bubbler valve closed
3/18/2012	12:57:31 PM	Bypass valve opened
3/18/2012	12:57:31 PM	Helium MFC set to  0.000000
3/18/2012	12:57:31 PM	H2 MFC set to  0.000000
3/18/2012	12:57:31 PM	BCl3 MFC set to  0.000000
3/18/2012	12:57:31 PM	PH3 MFC set to  0.000000
3/18/2012	12:57:31 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:57:31 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:57:31 PM	Tube furnace set to 0
3/18/2012	12:58:31 PM	Helium valve closed
3/18/2012	12:58:31 PM	H2 valve closed
3/18/2012	12:58:31 PM	BCl3 valve closed
3/18/2012	12:58:31 PM	PH3 valve closed
3/18/2012	12:58:31 PM	SiCl4 pre valve closed
3/18/2012	12:58:31 PM	SiCl4 post valve closed
3/18/2012	12:58:31 PM	Bypass valve closed
3/18/2012	12:58:31 PM	Bubbler valve closed
3/18/2012	12:58:31 PM	Main Vac valve opened
3/18/2012	12:58:31 PM	Helium MFC set to  0.000000
3/18/2012	12:58:31 PM	H2 MFC set to  0.000000
3/18/2012	12:58:31 PM	BCl3 MFC set to  0.000000
3/18/2012	12:58:31 PM	PH3 MFC set to  0.000000
3/18/2012	12:58:31 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:58:31 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:58:31 PM	Tube furnace set to 0
3/18/2012	12:58:32 PM	Run finished at 12:58 PM
3/18/2012	12:58:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	12:58:44 PM	Recipe started at 12:58 PM
3/18/2012	12:58:44 PM	Helium valve closed
3/18/2012	12:58:44 PM	H2 valve closed
3/18/2012	12:58:44 PM	BCl3 valve closed
3/18/2012	12:58:44 PM	PH3 valve closed
3/18/2012	12:58:44 PM	SiCl4 pre valve closed
3/18/2012	12:58:44 PM	SiCl4 post valve closed
3/18/2012	12:58:44 PM	Bypass valve closed
3/18/2012	12:58:44 PM	Bubbler valve closed
3/18/2012	12:58:44 PM	Main Vac valve opened
3/18/2012	12:58:44 PM	Helium MFC set to  0.000000
3/18/2012	12:58:44 PM	H2 MFC set to  0.000000
3/18/2012	12:58:44 PM	BCl3 MFC set to  0.000000
3/18/2012	12:58:44 PM	PH3 MFC set to  0.000000
3/18/2012	12:58:44 PM	SiCl4 MFC set to  0.000000
3/18/2012	12:58:44 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	12:58:44 PM	Tube furnace set to 0
3/18/2012	1:01:26 PM	Run aborted at 1:01 PM
3/18/2012	1:01:26 PM	Helium valve closed
3/18/2012	1:01:26 PM	H2 valve closed
3/18/2012	1:01:26 PM	BCl3 valve closed
3/18/2012	1:01:26 PM	PH3 valve closed
3/18/2012	1:01:26 PM	SiCl4 pre valve closed
3/18/2012	1:01:26 PM	SiCl4 post valve closed
3/18/2012	1:01:26 PM	Bypass valve closed
3/18/2012	1:01:26 PM	Main Vac valve closed
3/18/2012	1:01:26 PM	Bubbler valve closed
3/18/2012	1:01:26 PM	Helium MFC set to  0.000000
3/18/2012	1:01:26 PM	H2 MFC set to  0.000000
3/18/2012	1:01:26 PM	BCl3 MFC set to  0.000000
3/18/2012	1:01:26 PM	PH3 MFC set to  0.000000
3/18/2012	1:01:26 PM	SiCl4 MFC set to  0.000000
3/18/2012	1:01:26 PM	Tube furnace set to 0
3/18/2012	1:01:39 PM	Recipe started at 1:01 PM
3/18/2012	1:01:39 PM	Helium valve closed
3/18/2012	1:01:39 PM	H2 valve closed
3/18/2012	1:01:39 PM	BCl3 valve closed
3/18/2012	1:01:39 PM	PH3 valve closed
3/18/2012	1:01:39 PM	SiCl4 pre valve closed
3/18/2012	1:01:39 PM	SiCl4 post valve closed
3/18/2012	1:01:39 PM	Bypass valve closed
3/18/2012	1:01:39 PM	Bubbler valve closed
3/18/2012	1:01:39 PM	Main Vac valve opened
3/18/2012	1:01:39 PM	Helium MFC set to  0.000000
3/18/2012	1:01:39 PM	H2 MFC set to  0.000000
3/18/2012	1:01:39 PM	BCl3 MFC set to  0.000000
3/18/2012	1:01:39 PM	PH3 MFC set to  0.000000
3/18/2012	1:01:39 PM	SiCl4 MFC set to  0.000000
3/18/2012	1:01:39 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	1:01:40 PM	Tube furnace set to 0
3/18/2012	3:01:40 PM	Helium valve closed
3/18/2012	3:01:40 PM	H2 valve closed
3/18/2012	3:01:40 PM	BCl3 valve closed
3/18/2012	3:01:40 PM	PH3 valve closed
3/18/2012	3:01:40 PM	SiCl4 pre valve closed
3/18/2012	3:01:40 PM	SiCl4 post valve closed
3/18/2012	3:01:40 PM	Main Vac valve closed
3/18/2012	3:01:40 PM	Bypass valve closed
3/18/2012	3:01:40 PM	Bubbler valve closed
3/18/2012	3:01:40 PM	Helium MFC set to  0.000000
3/18/2012	3:01:40 PM	H2 MFC set to  0.000000
3/18/2012	3:01:40 PM	BCl3 MFC set to  0.000000
3/18/2012	3:01:40 PM	PH3 MFC set to  0.000000
3/18/2012	3:01:40 PM	SiCl4 MFC set to  0.000000
3/18/2012	3:01:40 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:01:40 PM	Tube furnace set to 0
3/18/2012	3:01:43 PM	Helium valve closed
3/18/2012	3:01:43 PM	BCl3 valve closed
3/18/2012	3:01:43 PM	PH3 valve closed
3/18/2012	3:01:43 PM	SiCl4 pre valve closed
3/18/2012	3:01:43 PM	SiCl4 post valve closed
3/18/2012	3:01:43 PM	Main Vac valve closed
3/18/2012	3:01:43 PM	Bypass valve closed
3/18/2012	3:01:43 PM	Bubbler valve closed
3/18/2012	3:01:43 PM	H2 valve opened
3/18/2012	3:01:43 PM	Helium MFC set to  0.000000
3/18/2012	3:01:43 PM	H2 MFC set to  500.000000
3/18/2012	3:01:43 PM	BCl3 MFC set to  0.000000
3/18/2012	3:01:43 PM	PH3 MFC set to  0.000000
3/18/2012	3:01:43 PM	SiCl4 MFC set to  0.000000
3/18/2012	3:01:43 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:01:43 PM	Tube furnace set to 0
3/18/2012	3:02:51 PM	Helium valve closed
3/18/2012	3:02:51 PM	BCl3 valve closed
3/18/2012	3:02:51 PM	PH3 valve closed
3/18/2012	3:02:51 PM	SiCl4 pre valve closed
3/18/2012	3:02:51 PM	SiCl4 post valve closed
3/18/2012	3:02:51 PM	Main Vac valve closed
3/18/2012	3:02:51 PM	Bypass valve closed
3/18/2012	3:02:51 PM	H2 valve opened
3/18/2012	3:02:51 PM	Bubbler valve opened
3/18/2012	3:02:51 PM	Helium MFC set to  0.000000
3/18/2012	3:02:51 PM	H2 MFC set to  500.000000
3/18/2012	3:02:51 PM	BCl3 MFC set to  0.000000
3/18/2012	3:02:51 PM	PH3 MFC set to  0.000000
3/18/2012	3:02:51 PM	SiCl4 MFC set to  0.000000
3/18/2012	3:02:51 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:02:51 PM	Tube furnace set to 0
3/18/2012	3:02:52 PM	Helium valve closed
3/18/2012	3:02:52 PM	BCl3 valve closed
3/18/2012	3:02:52 PM	PH3 valve closed
3/18/2012	3:02:52 PM	SiCl4 pre valve closed
3/18/2012	3:02:52 PM	SiCl4 post valve closed
3/18/2012	3:02:52 PM	Main Vac valve closed
3/18/2012	3:02:52 PM	Bypass valve closed
3/18/2012	3:02:52 PM	H2 valve opened
3/18/2012	3:02:52 PM	Bubbler valve opened
3/18/2012	3:02:52 PM	Helium MFC set to  0.000000
3/18/2012	3:02:52 PM	H2 MFC set to  500.000000
3/18/2012	3:02:52 PM	BCl3 MFC set to  0.000000
3/18/2012	3:02:52 PM	PH3 MFC set to  0.000000
3/18/2012	3:02:52 PM	SiCl4 MFC set to  0.000000
3/18/2012	3:02:52 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:02:52 PM	Tube furnace set to 1000
3/18/2012	3:27:52 PM	Helium valve closed
3/18/2012	3:27:52 PM	PH3 valve closed
3/18/2012	3:27:52 PM	Main Vac valve closed
3/18/2012	3:27:52 PM	Bypass valve closed
3/18/2012	3:27:52 PM	H2 valve opened
3/18/2012	3:27:52 PM	BCl3 valve opened
3/18/2012	3:27:52 PM	SiCl4 pre valve opened
3/18/2012	3:27:52 PM	SiCl4 post valve opened
3/18/2012	3:27:52 PM	Bubbler valve opened
3/18/2012	3:27:52 PM	Helium MFC set to  0.000000
3/18/2012	3:27:52 PM	H2 MFC set to  450.000000
3/18/2012	3:27:52 PM	BCl3 MFC set to  1.500000
3/18/2012	3:27:52 PM	PH3 MFC set to  0.000000
3/18/2012	3:27:52 PM	SiCl4 MFC set to  50.000000
3/18/2012	3:27:52 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:27:52 PM	Tube furnace set to 1000
3/18/2012	3:48:52 PM	Helium valve closed
3/18/2012	3:48:52 PM	BCl3 valve closed
3/18/2012	3:48:52 PM	PH3 valve closed
3/18/2012	3:48:52 PM	SiCl4 pre valve closed
3/18/2012	3:48:52 PM	SiCl4 post valve closed
3/18/2012	3:48:52 PM	Main Vac valve closed
3/18/2012	3:48:52 PM	Bypass valve closed
3/18/2012	3:48:52 PM	H2 valve opened
3/18/2012	3:48:52 PM	Bubbler valve opened
3/18/2012	3:48:52 PM	Helium MFC set to  0.000000
3/18/2012	3:48:52 PM	H2 MFC set to  500.000000
3/18/2012	3:48:52 PM	BCl3 MFC set to  0.000000
3/18/2012	3:48:52 PM	PH3 MFC set to  0.000000
3/18/2012	3:48:52 PM	SiCl4 MFC set to  0.000000
3/18/2012	3:48:52 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	3:48:53 PM	Tube furnace set to 750
3/18/2012	4:03:53 PM	H2 valve closed
3/18/2012	4:03:53 PM	BCl3 valve closed
3/18/2012	4:03:53 PM	PH3 valve closed
3/18/2012	4:03:53 PM	SiCl4 pre valve closed
3/18/2012	4:03:53 PM	SiCl4 post valve closed
3/18/2012	4:03:53 PM	Main Vac valve closed
3/18/2012	4:03:53 PM	Bypass valve closed
3/18/2012	4:03:53 PM	Helium valve opened
3/18/2012	4:03:53 PM	Bubbler valve opened
3/18/2012	4:03:53 PM	Helium MFC set to  500.000000
3/18/2012	4:03:53 PM	H2 MFC set to  0.000000
3/18/2012	4:03:53 PM	BCl3 MFC set to  0.000000
3/18/2012	4:03:53 PM	PH3 MFC set to  0.000000
3/18/2012	4:03:53 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:03:53 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:03:53 PM	Tube furnace set to 0
3/18/2012	4:23:53 PM	Helium valve closed
3/18/2012	4:23:53 PM	H2 valve closed
3/18/2012	4:23:53 PM	BCl3 valve closed
3/18/2012	4:23:53 PM	PH3 valve closed
3/18/2012	4:23:53 PM	SiCl4 pre valve closed
3/18/2012	4:23:53 PM	SiCl4 post valve closed
3/18/2012	4:23:53 PM	Main Vac valve closed
3/18/2012	4:23:53 PM	Bypass valve closed
3/18/2012	4:23:53 PM	Bubbler valve closed
3/18/2012	4:23:53 PM	Helium MFC set to  0.000000
3/18/2012	4:23:53 PM	H2 MFC set to  0.000000
3/18/2012	4:23:53 PM	BCl3 MFC set to  0.000000
3/18/2012	4:23:53 PM	PH3 MFC set to  0.000000
3/18/2012	4:23:53 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:23:53 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:23:53 PM	Tube furnace set to 0
3/18/2012	4:43:53 PM	Helium valve closed
3/18/2012	4:43:53 PM	H2 valve closed
3/18/2012	4:43:53 PM	BCl3 valve closed
3/18/2012	4:43:53 PM	PH3 valve closed
3/18/2012	4:43:53 PM	SiCl4 pre valve closed
3/18/2012	4:43:53 PM	SiCl4 post valve closed
3/18/2012	4:43:53 PM	Main Vac valve closed
3/18/2012	4:43:53 PM	Bubbler valve closed
3/18/2012	4:43:53 PM	Bypass valve opened
3/18/2012	4:43:53 PM	Helium MFC set to  0.000000
3/18/2012	4:43:53 PM	H2 MFC set to  0.000000
3/18/2012	4:43:53 PM	BCl3 MFC set to  0.000000
3/18/2012	4:43:53 PM	PH3 MFC set to  0.000000
3/18/2012	4:43:53 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:43:53 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:43:53 PM	Tube furnace set to 0
3/18/2012	4:44:40 PM	Helium valve closed
3/18/2012	4:44:40 PM	H2 valve closed
3/18/2012	4:44:40 PM	BCl3 valve closed
3/18/2012	4:44:40 PM	PH3 valve closed
3/18/2012	4:44:40 PM	SiCl4 pre valve closed
3/18/2012	4:44:40 PM	SiCl4 post valve closed
3/18/2012	4:44:40 PM	Main Vac valve closed
3/18/2012	4:44:40 PM	Bubbler valve closed
3/18/2012	4:44:40 PM	Bypass valve opened
3/18/2012	4:44:40 PM	Helium MFC set to  0.000000
3/18/2012	4:44:40 PM	H2 MFC set to  0.000000
3/18/2012	4:44:40 PM	BCl3 MFC set to  0.000000
3/18/2012	4:44:40 PM	PH3 MFC set to  0.000000
3/18/2012	4:44:40 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:44:40 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:44:40 PM	Tube furnace set to 0
3/18/2012	4:45:40 PM	Helium valve closed
3/18/2012	4:45:40 PM	H2 valve closed
3/18/2012	4:45:40 PM	BCl3 valve closed
3/18/2012	4:45:40 PM	PH3 valve closed
3/18/2012	4:45:40 PM	SiCl4 pre valve closed
3/18/2012	4:45:40 PM	SiCl4 post valve closed
3/18/2012	4:45:40 PM	Bypass valve closed
3/18/2012	4:45:40 PM	Bubbler valve closed
3/18/2012	4:45:40 PM	Main Vac valve opened
3/18/2012	4:45:40 PM	Helium MFC set to  0.000000
3/18/2012	4:45:40 PM	H2 MFC set to  0.000000
3/18/2012	4:45:40 PM	BCl3 MFC set to  0.000000
3/18/2012	4:45:40 PM	PH3 MFC set to  0.000000
3/18/2012	4:45:40 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:45:40 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:45:41 PM	Tube furnace set to 0
3/18/2012	4:45:59 PM	Run aborted at 4:45 PM
3/18/2012	4:45:59 PM	Helium valve closed
3/18/2012	4:45:59 PM	H2 valve closed
3/18/2012	4:45:59 PM	BCl3 valve closed
3/18/2012	4:45:59 PM	PH3 valve closed
3/18/2012	4:45:59 PM	SiCl4 pre valve closed
3/18/2012	4:45:59 PM	SiCl4 post valve closed
3/18/2012	4:45:59 PM	Bypass valve closed
3/18/2012	4:45:59 PM	Main Vac valve closed
3/18/2012	4:45:59 PM	Bubbler valve closed
3/18/2012	4:45:59 PM	Helium MFC set to  0.000000
3/18/2012	4:45:59 PM	H2 MFC set to  0.000000
3/18/2012	4:45:59 PM	BCl3 MFC set to  0.000000
3/18/2012	4:45:59 PM	PH3 MFC set to  0.000000
3/18/2012	4:45:59 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:45:59 PM	Tube furnace set to 0
3/18/2012	4:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	4:47:01 PM	Recipe started at 4:47 PM
3/18/2012	4:47:01 PM	Helium valve closed
3/18/2012	4:47:01 PM	H2 valve closed
3/18/2012	4:47:01 PM	BCl3 valve closed
3/18/2012	4:47:01 PM	PH3 valve closed
3/18/2012	4:47:01 PM	SiCl4 pre valve closed
3/18/2012	4:47:01 PM	SiCl4 post valve closed
3/18/2012	4:47:01 PM	Main Vac valve closed
3/18/2012	4:47:01 PM	Bypass valve closed
3/18/2012	4:47:01 PM	Bubbler valve closed
3/18/2012	4:47:01 PM	Helium MFC set to  0.000000
3/18/2012	4:47:01 PM	H2 MFC set to  0.000000
3/18/2012	4:47:01 PM	BCl3 MFC set to  0.000000
3/18/2012	4:47:01 PM	PH3 MFC set to  0.000000
3/18/2012	4:47:01 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:47:01 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:47:01 PM	Tube furnace set to 0
3/18/2012	4:47:04 PM	H2 valve closed
3/18/2012	4:47:04 PM	BCl3 valve closed
3/18/2012	4:47:04 PM	PH3 valve closed
3/18/2012	4:47:04 PM	SiCl4 pre valve closed
3/18/2012	4:47:04 PM	SiCl4 post valve closed
3/18/2012	4:47:04 PM	Main Vac valve closed
3/18/2012	4:47:04 PM	Bypass valve closed
3/18/2012	4:47:04 PM	Bubbler valve closed
3/18/2012	4:47:04 PM	Helium valve opened
3/18/2012	4:47:04 PM	Helium MFC set to  500.000000
3/18/2012	4:47:04 PM	H2 MFC set to  0.000000
3/18/2012	4:47:04 PM	BCl3 MFC set to  0.000000
3/18/2012	4:47:04 PM	PH3 MFC set to  0.000000
3/18/2012	4:47:04 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:47:04 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:47:05 PM	Tube furnace set to 0
3/18/2012	4:48:06 PM	Helium valve closed
3/18/2012	4:48:06 PM	H2 valve closed
3/18/2012	4:48:06 PM	BCl3 valve closed
3/18/2012	4:48:06 PM	PH3 valve closed
3/18/2012	4:48:06 PM	SiCl4 pre valve closed
3/18/2012	4:48:06 PM	SiCl4 post valve closed
3/18/2012	4:48:06 PM	Main Vac valve closed
3/18/2012	4:48:06 PM	Bypass valve closed
3/18/2012	4:48:06 PM	Bubbler valve closed
3/18/2012	4:48:06 PM	Helium MFC set to  0.000000
3/18/2012	4:48:06 PM	H2 MFC set to  0.000000
3/18/2012	4:48:06 PM	BCl3 MFC set to  0.000000
3/18/2012	4:48:06 PM	PH3 MFC set to  0.000000
3/18/2012	4:48:06 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:48:06 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:48:06 PM	Tube furnace set to 0
3/18/2012	4:48:07 PM	Run finished at 4:48 PM
3/18/2012	4:48:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	4:49:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	4:49:41 PM	Recipe started at 4:49 PM
3/18/2012	4:49:41 PM	Helium valve closed
3/18/2012	4:49:41 PM	H2 valve closed
3/18/2012	4:49:42 PM	BCl3 valve closed
3/18/2012	4:49:42 PM	PH3 valve closed
3/18/2012	4:49:42 PM	SiCl4 pre valve closed
3/18/2012	4:49:42 PM	SiCl4 post valve closed
3/18/2012	4:49:42 PM	Main Vac valve closed
3/18/2012	4:49:42 PM	Bypass valve closed
3/18/2012	4:49:42 PM	Bubbler valve closed
3/18/2012	4:49:42 PM	Helium MFC set to  0.000000
3/18/2012	4:49:42 PM	H2 MFC set to  0.000000
3/18/2012	4:49:42 PM	BCl3 MFC set to  0.000000
3/18/2012	4:49:42 PM	PH3 MFC set to  0.000000
3/18/2012	4:49:42 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:49:42 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:49:42 PM	Tube furnace set to 0
3/18/2012	4:49:45 PM	H2 valve closed
3/18/2012	4:49:45 PM	BCl3 valve closed
3/18/2012	4:49:45 PM	PH3 valve closed
3/18/2012	4:49:45 PM	SiCl4 pre valve closed
3/18/2012	4:49:45 PM	SiCl4 post valve closed
3/18/2012	4:49:45 PM	Main Vac valve closed
3/18/2012	4:49:45 PM	Bypass valve closed
3/18/2012	4:49:45 PM	Bubbler valve closed
3/18/2012	4:49:45 PM	Helium valve opened
3/18/2012	4:49:45 PM	Helium MFC set to  500.000000
3/18/2012	4:49:45 PM	H2 MFC set to  0.000000
3/18/2012	4:49:45 PM	BCl3 MFC set to  0.000000
3/18/2012	4:49:45 PM	PH3 MFC set to  0.000000
3/18/2012	4:49:45 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:49:45 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:49:45 PM	Tube furnace set to 0
3/18/2012	4:49:46 PM	Helium valve closed
3/18/2012	4:49:46 PM	H2 valve closed
3/18/2012	4:49:46 PM	BCl3 valve closed
3/18/2012	4:49:46 PM	PH3 valve closed
3/18/2012	4:49:46 PM	SiCl4 pre valve closed
3/18/2012	4:49:46 PM	SiCl4 post valve closed
3/18/2012	4:49:46 PM	Main Vac valve closed
3/18/2012	4:49:46 PM	Bypass valve closed
3/18/2012	4:49:46 PM	Bubbler valve closed
3/18/2012	4:49:46 PM	Helium MFC set to  0.000000
3/18/2012	4:49:46 PM	H2 MFC set to  0.000000
3/18/2012	4:49:46 PM	BCl3 MFC set to  0.000000
3/18/2012	4:49:46 PM	PH3 MFC set to  0.000000
3/18/2012	4:49:46 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:49:46 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:49:46 PM	Tube furnace set to 0
3/18/2012	4:49:47 PM	Run finished at 4:49 PM
3/18/2012	4:49:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	4:55:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	4:55:28 PM	Recipe started at 4:55 PM
3/18/2012	4:55:29 PM	Helium valve closed
3/18/2012	4:55:29 PM	H2 valve closed
3/18/2012	4:55:29 PM	BCl3 valve closed
3/18/2012	4:55:29 PM	PH3 valve closed
3/18/2012	4:55:29 PM	SiCl4 pre valve closed
3/18/2012	4:55:29 PM	SiCl4 post valve closed
3/18/2012	4:55:29 PM	Main Vac valve closed
3/18/2012	4:55:29 PM	Bubbler valve closed
3/18/2012	4:55:29 PM	Bypass valve opened
3/18/2012	4:55:29 PM	Helium MFC set to  0.000000
3/18/2012	4:55:29 PM	H2 MFC set to  0.000000
3/18/2012	4:55:29 PM	BCl3 MFC set to  0.000000
3/18/2012	4:55:29 PM	PH3 MFC set to  0.000000
3/18/2012	4:55:29 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:55:29 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:55:29 PM	Tube furnace set to 0
3/18/2012	4:56:29 PM	Helium valve closed
3/18/2012	4:56:29 PM	H2 valve closed
3/18/2012	4:56:29 PM	BCl3 valve closed
3/18/2012	4:56:29 PM	PH3 valve closed
3/18/2012	4:56:29 PM	SiCl4 pre valve closed
3/18/2012	4:56:29 PM	SiCl4 post valve closed
3/18/2012	4:56:29 PM	Main Vac valve closed
3/18/2012	4:56:29 PM	Bubbler valve closed
3/18/2012	4:56:29 PM	Bypass valve opened
3/18/2012	4:56:29 PM	Helium MFC set to  0.000000
3/18/2012	4:56:29 PM	H2 MFC set to  0.000000
3/18/2012	4:56:29 PM	BCl3 MFC set to  0.000000
3/18/2012	4:56:29 PM	PH3 MFC set to  0.000000
3/18/2012	4:56:29 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:56:29 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:56:29 PM	Tube furnace set to 0
3/18/2012	4:57:29 PM	Helium valve closed
3/18/2012	4:57:29 PM	H2 valve closed
3/18/2012	4:57:29 PM	BCl3 valve closed
3/18/2012	4:57:29 PM	PH3 valve closed
3/18/2012	4:57:30 PM	SiCl4 pre valve closed
3/18/2012	4:57:30 PM	SiCl4 post valve closed
3/18/2012	4:57:30 PM	Bypass valve closed
3/18/2012	4:57:30 PM	Bubbler valve closed
3/18/2012	4:57:30 PM	Main Vac valve opened
3/18/2012	4:57:30 PM	Helium MFC set to  0.000000
3/18/2012	4:57:30 PM	H2 MFC set to  0.000000
3/18/2012	4:57:30 PM	BCl3 MFC set to  0.000000
3/18/2012	4:57:30 PM	PH3 MFC set to  0.000000
3/18/2012	4:57:30 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:57:30 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:57:30 PM	Tube furnace set to 0
3/18/2012	4:57:31 PM	Run finished at 4:57 PM
3/18/2012	4:57:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	4:58:24 PM	Recipe started at 4:58 PM
3/18/2012	4:58:24 PM	Helium valve closed
3/18/2012	4:58:24 PM	H2 valve closed
3/18/2012	4:58:24 PM	BCl3 valve closed
3/18/2012	4:58:24 PM	PH3 valve closed
3/18/2012	4:58:24 PM	SiCl4 pre valve closed
3/18/2012	4:58:24 PM	SiCl4 post valve closed
3/18/2012	4:58:24 PM	Bypass valve closed
3/18/2012	4:58:24 PM	Bubbler valve closed
3/18/2012	4:58:24 PM	Main Vac valve opened
3/18/2012	4:58:24 PM	Helium MFC set to  0.000000
3/18/2012	4:58:24 PM	H2 MFC set to  0.000000
3/18/2012	4:58:24 PM	BCl3 MFC set to  0.000000
3/18/2012	4:58:24 PM	PH3 MFC set to  0.000000
3/18/2012	4:58:24 PM	SiCl4 MFC set to  0.000000
3/18/2012	4:58:24 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	4:58:24 PM	Tube furnace set to 0
3/18/2012	6:28:24 PM	Helium valve closed
3/18/2012	6:28:24 PM	H2 valve closed
3/18/2012	6:28:24 PM	BCl3 valve closed
3/18/2012	6:28:24 PM	PH3 valve closed
3/18/2012	6:28:24 PM	SiCl4 pre valve closed
3/18/2012	6:28:24 PM	SiCl4 post valve closed
3/18/2012	6:28:24 PM	Main Vac valve closed
3/18/2012	6:28:24 PM	Bypass valve closed
3/18/2012	6:28:24 PM	Bubbler valve closed
3/18/2012	6:28:24 PM	Helium MFC set to  0.000000
3/18/2012	6:28:24 PM	H2 MFC set to  0.000000
3/18/2012	6:28:24 PM	BCl3 MFC set to  0.000000
3/18/2012	6:28:24 PM	PH3 MFC set to  0.000000
3/18/2012	6:28:24 PM	SiCl4 MFC set to  0.000000
3/18/2012	6:28:24 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	6:28:24 PM	Tube furnace set to 0
3/18/2012	6:28:27 PM	Helium valve closed
3/18/2012	6:28:27 PM	BCl3 valve closed
3/18/2012	6:28:27 PM	PH3 valve closed
3/18/2012	6:28:27 PM	SiCl4 pre valve closed
3/18/2012	6:28:27 PM	SiCl4 post valve closed
3/18/2012	6:28:27 PM	Main Vac valve closed
3/18/2012	6:28:27 PM	Bypass valve closed
3/18/2012	6:28:27 PM	Bubbler valve closed
3/18/2012	6:28:27 PM	H2 valve opened
3/18/2012	6:28:27 PM	Helium MFC set to  0.000000
3/18/2012	6:28:27 PM	H2 MFC set to  500.000000
3/18/2012	6:28:27 PM	BCl3 MFC set to  0.000000
3/18/2012	6:28:27 PM	PH3 MFC set to  0.000000
3/18/2012	6:28:27 PM	SiCl4 MFC set to  0.000000
3/18/2012	6:28:27 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	6:28:27 PM	Tube furnace set to 0
3/18/2012	6:29:33 PM	Helium valve closed
3/18/2012	6:29:33 PM	BCl3 valve closed
3/18/2012	6:29:33 PM	PH3 valve closed
3/18/2012	6:29:33 PM	SiCl4 pre valve closed
3/18/2012	6:29:33 PM	SiCl4 post valve closed
3/18/2012	6:29:33 PM	Main Vac valve closed
3/18/2012	6:29:33 PM	Bypass valve closed
3/18/2012	6:29:33 PM	H2 valve opened
3/18/2012	6:29:33 PM	Bubbler valve opened
3/18/2012	6:29:33 PM	Helium MFC set to  0.000000
3/18/2012	6:29:33 PM	H2 MFC set to  500.000000
3/18/2012	6:29:33 PM	BCl3 MFC set to  0.000000
3/18/2012	6:29:33 PM	PH3 MFC set to  0.000000
3/18/2012	6:29:33 PM	SiCl4 MFC set to  0.000000
3/18/2012	6:29:33 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	6:29:33 PM	Tube furnace set to 0
3/18/2012	6:29:34 PM	Helium valve closed
3/18/2012	6:29:34 PM	BCl3 valve closed
3/18/2012	6:29:34 PM	PH3 valve closed
3/18/2012	6:29:34 PM	SiCl4 pre valve closed
3/18/2012	6:29:34 PM	SiCl4 post valve closed
3/18/2012	6:29:34 PM	Main Vac valve closed
3/18/2012	6:29:34 PM	Bypass valve closed
3/18/2012	6:29:34 PM	H2 valve opened
3/18/2012	6:29:34 PM	Bubbler valve opened
3/18/2012	6:29:34 PM	Helium MFC set to  0.000000
3/18/2012	6:29:34 PM	H2 MFC set to  500.000000
3/18/2012	6:29:34 PM	BCl3 MFC set to  0.000000
3/18/2012	6:29:34 PM	PH3 MFC set to  0.000000
3/18/2012	6:29:34 PM	SiCl4 MFC set to  0.000000
3/18/2012	6:29:34 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	6:29:35 PM	Tube furnace set to 1000
3/18/2012	6:54:35 PM	Helium valve closed
3/18/2012	6:54:35 PM	PH3 valve closed
3/18/2012	6:54:35 PM	Main Vac valve closed
3/18/2012	6:54:35 PM	Bypass valve closed
3/18/2012	6:54:35 PM	H2 valve opened
3/18/2012	6:54:35 PM	BCl3 valve opened
3/18/2012	6:54:35 PM	SiCl4 pre valve opened
3/18/2012	6:54:35 PM	SiCl4 post valve opened
3/18/2012	6:54:35 PM	Bubbler valve opened
3/18/2012	6:54:35 PM	Helium MFC set to  0.000000
3/18/2012	6:54:35 PM	H2 MFC set to  450.000000
3/18/2012	6:54:35 PM	BCl3 MFC set to  1.500000
3/18/2012	6:54:35 PM	PH3 MFC set to  0.000000
3/18/2012	6:54:35 PM	SiCl4 MFC set to  50.000000
3/18/2012	6:54:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	6:54:35 PM	Tube furnace set to 1000
3/18/2012	7:15:35 PM	Helium valve closed
3/18/2012	7:15:35 PM	BCl3 valve closed
3/18/2012	7:15:35 PM	PH3 valve closed
3/18/2012	7:15:35 PM	SiCl4 pre valve closed
3/18/2012	7:15:35 PM	SiCl4 post valve closed
3/18/2012	7:15:35 PM	Main Vac valve closed
3/18/2012	7:15:35 PM	Bypass valve closed
3/18/2012	7:15:35 PM	H2 valve opened
3/18/2012	7:15:35 PM	Bubbler valve opened
3/18/2012	7:15:35 PM	Helium MFC set to  0.000000
3/18/2012	7:15:35 PM	H2 MFC set to  500.000000
3/18/2012	7:15:35 PM	BCl3 MFC set to  0.000000
3/18/2012	7:15:35 PM	PH3 MFC set to  0.000000
3/18/2012	7:15:35 PM	SiCl4 MFC set to  0.000000
3/18/2012	7:15:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:15:35 PM	Tube furnace set to 750
3/18/2012	7:30:35 PM	H2 valve closed
3/18/2012	7:30:35 PM	BCl3 valve closed
3/18/2012	7:30:35 PM	PH3 valve closed
3/18/2012	7:30:35 PM	SiCl4 pre valve closed
3/18/2012	7:30:35 PM	SiCl4 post valve closed
3/18/2012	7:30:35 PM	Main Vac valve closed
3/18/2012	7:30:35 PM	Bypass valve closed
3/18/2012	7:30:35 PM	Helium valve opened
3/18/2012	7:30:35 PM	Bubbler valve opened
3/18/2012	7:30:35 PM	Helium MFC set to  500.000000
3/18/2012	7:30:35 PM	H2 MFC set to  0.000000
3/18/2012	7:30:35 PM	BCl3 MFC set to  0.000000
3/18/2012	7:30:35 PM	PH3 MFC set to  0.000000
3/18/2012	7:30:35 PM	SiCl4 MFC set to  0.000000
3/18/2012	7:30:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:30:35 PM	Tube furnace set to 0
3/18/2012	7:50:35 PM	Helium valve closed
3/18/2012	7:50:35 PM	H2 valve closed
3/18/2012	7:50:35 PM	BCl3 valve closed
3/18/2012	7:50:35 PM	PH3 valve closed
3/18/2012	7:50:35 PM	SiCl4 pre valve closed
3/18/2012	7:50:35 PM	SiCl4 post valve closed
3/18/2012	7:50:35 PM	Main Vac valve closed
3/18/2012	7:50:35 PM	Bypass valve closed
3/18/2012	7:50:35 PM	Bubbler valve closed
3/18/2012	7:50:35 PM	Helium MFC set to  0.000000
3/18/2012	7:50:35 PM	H2 MFC set to  0.000000
3/18/2012	7:50:35 PM	BCl3 MFC set to  0.000000
3/18/2012	7:50:35 PM	PH3 MFC set to  0.000000
3/18/2012	7:50:35 PM	SiCl4 MFC set to  0.000000
3/18/2012	7:50:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	7:50:35 PM	Tube furnace set to 0
3/18/2012	8:10:35 PM	Helium valve closed
3/18/2012	8:10:35 PM	H2 valve closed
3/18/2012	8:10:35 PM	BCl3 valve closed
3/18/2012	8:10:35 PM	PH3 valve closed
3/18/2012	8:10:35 PM	SiCl4 pre valve closed
3/18/2012	8:10:35 PM	SiCl4 post valve closed
3/18/2012	8:10:35 PM	Main Vac valve closed
3/18/2012	8:10:35 PM	Bubbler valve closed
3/18/2012	8:10:35 PM	Bypass valve opened
3/18/2012	8:10:35 PM	Helium MFC set to  0.000000
3/18/2012	8:10:35 PM	H2 MFC set to  0.000000
3/18/2012	8:10:35 PM	BCl3 MFC set to  0.000000
3/18/2012	8:10:35 PM	PH3 MFC set to  0.000000
3/18/2012	8:10:35 PM	SiCl4 MFC set to  0.000000
3/18/2012	8:10:35 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	8:10:36 PM	Tube furnace set to 0
3/18/2012	8:11:20 PM	Helium valve closed
3/18/2012	8:11:20 PM	H2 valve closed
3/18/2012	8:11:20 PM	BCl3 valve closed
3/18/2012	8:11:20 PM	PH3 valve closed
3/18/2012	8:11:20 PM	SiCl4 pre valve closed
3/18/2012	8:11:20 PM	SiCl4 post valve closed
3/18/2012	8:11:20 PM	Main Vac valve closed
3/18/2012	8:11:20 PM	Bubbler valve closed
3/18/2012	8:11:20 PM	Bypass valve opened
3/18/2012	8:11:20 PM	Helium MFC set to  0.000000
3/18/2012	8:11:20 PM	H2 MFC set to  0.000000
3/18/2012	8:11:20 PM	BCl3 MFC set to  0.000000
3/18/2012	8:11:20 PM	PH3 MFC set to  0.000000
3/18/2012	8:11:20 PM	SiCl4 MFC set to  0.000000
3/18/2012	8:11:20 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	8:11:20 PM	Tube furnace set to 0
3/18/2012	8:12:21 PM	Helium valve closed
3/18/2012	8:12:21 PM	H2 valve closed
3/18/2012	8:12:21 PM	BCl3 valve closed
3/18/2012	8:12:21 PM	PH3 valve closed
3/18/2012	8:12:21 PM	SiCl4 pre valve closed
3/18/2012	8:12:21 PM	SiCl4 post valve closed
3/18/2012	8:12:21 PM	Bypass valve closed
3/18/2012	8:12:21 PM	Bubbler valve closed
3/18/2012	8:12:21 PM	Main Vac valve opened
3/18/2012	8:12:21 PM	Helium MFC set to  0.000000
3/18/2012	8:12:21 PM	H2 MFC set to  0.000000
3/18/2012	8:12:21 PM	BCl3 MFC set to  0.000000
3/18/2012	8:12:21 PM	PH3 MFC set to  0.000000
3/18/2012	8:12:21 PM	SiCl4 MFC set to  0.000000
3/18/2012	8:12:21 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	8:12:21 PM	Tube furnace set to 0
3/18/2012	9:07:41 PM	Run aborted at 9:07 PM
3/18/2012	9:07:41 PM	Helium valve closed
3/18/2012	9:07:41 PM	H2 valve closed
3/18/2012	9:07:41 PM	BCl3 valve closed
3/18/2012	9:07:42 PM	PH3 valve closed
3/18/2012	9:07:42 PM	SiCl4 pre valve closed
3/18/2012	9:07:42 PM	SiCl4 post valve closed
3/18/2012	9:07:42 PM	Bypass valve closed
3/18/2012	9:07:42 PM	Main Vac valve closed
3/18/2012	9:07:42 PM	Bubbler valve closed
3/18/2012	9:07:42 PM	Helium MFC set to  0.000000
3/18/2012	9:07:42 PM	H2 MFC set to  0.000000
3/18/2012	9:07:42 PM	BCl3 MFC set to  0.000000
3/18/2012	9:07:42 PM	PH3 MFC set to  0.000000
3/18/2012	9:07:42 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:07:42 PM	Tube furnace set to 0
3/18/2012	9:07:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	9:07:56 PM	Recipe started at 9:07 PM
3/18/2012	9:07:56 PM	Helium valve closed
3/18/2012	9:07:56 PM	H2 valve closed
3/18/2012	9:07:56 PM	BCl3 valve closed
3/18/2012	9:07:56 PM	PH3 valve closed
3/18/2012	9:07:56 PM	SiCl4 pre valve closed
3/18/2012	9:07:56 PM	SiCl4 post valve closed
3/18/2012	9:07:56 PM	Main Vac valve closed
3/18/2012	9:07:56 PM	Bypass valve closed
3/18/2012	9:07:56 PM	Bubbler valve closed
3/18/2012	9:07:56 PM	Helium MFC set to  0.000000
3/18/2012	9:07:56 PM	H2 MFC set to  0.000000
3/18/2012	9:07:56 PM	BCl3 MFC set to  0.000000
3/18/2012	9:07:56 PM	PH3 MFC set to  0.000000
3/18/2012	9:07:56 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:07:56 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:07:56 PM	Tube furnace set to 0
3/18/2012	9:07:59 PM	H2 valve closed
3/18/2012	9:07:59 PM	BCl3 valve closed
3/18/2012	9:07:59 PM	PH3 valve closed
3/18/2012	9:07:59 PM	SiCl4 pre valve closed
3/18/2012	9:07:59 PM	SiCl4 post valve closed
3/18/2012	9:07:59 PM	Main Vac valve closed
3/18/2012	9:07:59 PM	Bypass valve closed
3/18/2012	9:07:59 PM	Bubbler valve closed
3/18/2012	9:07:59 PM	Helium valve opened
3/18/2012	9:07:59 PM	Helium MFC set to  500.000000
3/18/2012	9:07:59 PM	H2 MFC set to  0.000000
3/18/2012	9:07:59 PM	BCl3 MFC set to  0.000000
3/18/2012	9:07:59 PM	PH3 MFC set to  0.000000
3/18/2012	9:07:59 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:07:59 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:07:59 PM	Tube furnace set to 0
3/18/2012	9:09:00 PM	Helium valve closed
3/18/2012	9:09:00 PM	H2 valve closed
3/18/2012	9:09:00 PM	BCl3 valve closed
3/18/2012	9:09:00 PM	PH3 valve closed
3/18/2012	9:09:00 PM	SiCl4 pre valve closed
3/18/2012	9:09:00 PM	SiCl4 post valve closed
3/18/2012	9:09:00 PM	Main Vac valve closed
3/18/2012	9:09:00 PM	Bypass valve closed
3/18/2012	9:09:00 PM	Bubbler valve closed
3/18/2012	9:09:00 PM	Helium MFC set to  0.000000
3/18/2012	9:09:00 PM	H2 MFC set to  0.000000
3/18/2012	9:09:00 PM	BCl3 MFC set to  0.000000
3/18/2012	9:09:00 PM	PH3 MFC set to  0.000000
3/18/2012	9:09:00 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:09:00 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:09:00 PM	Tube furnace set to 0
3/18/2012	9:09:01 PM	Run finished at 9:09 PM
3/18/2012	9:09:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/18/2012	9:12:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	9:12:34 PM	Recipe started at 9:12 PM
3/18/2012	9:12:34 PM	Helium valve closed
3/18/2012	9:12:34 PM	H2 valve closed
3/18/2012	9:12:34 PM	BCl3 valve closed
3/18/2012	9:12:34 PM	PH3 valve closed
3/18/2012	9:12:34 PM	SiCl4 pre valve closed
3/18/2012	9:12:34 PM	SiCl4 post valve closed
3/18/2012	9:12:34 PM	Main Vac valve closed
3/18/2012	9:12:34 PM	Bubbler valve closed
3/18/2012	9:12:34 PM	Bypass valve opened
3/18/2012	9:12:34 PM	Helium MFC set to  0.000000
3/18/2012	9:12:34 PM	H2 MFC set to  0.000000
3/18/2012	9:12:34 PM	BCl3 MFC set to  0.000000
3/18/2012	9:12:34 PM	PH3 MFC set to  0.000000
3/18/2012	9:12:34 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:12:34 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:12:34 PM	Tube furnace set to 0
3/18/2012	9:13:32 PM	Helium valve closed
3/18/2012	9:13:32 PM	H2 valve closed
3/18/2012	9:13:32 PM	BCl3 valve closed
3/18/2012	9:13:32 PM	PH3 valve closed
3/18/2012	9:13:32 PM	SiCl4 pre valve closed
3/18/2012	9:13:32 PM	SiCl4 post valve closed
3/18/2012	9:13:32 PM	Main Vac valve closed
3/18/2012	9:13:32 PM	Bubbler valve closed
3/18/2012	9:13:32 PM	Bypass valve opened
3/18/2012	9:13:32 PM	Helium MFC set to  0.000000
3/18/2012	9:13:32 PM	H2 MFC set to  0.000000
3/18/2012	9:13:32 PM	BCl3 MFC set to  0.000000
3/18/2012	9:13:32 PM	PH3 MFC set to  0.000000
3/18/2012	9:13:32 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:13:32 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:13:32 PM	Tube furnace set to 0
3/18/2012	9:14:32 PM	Helium valve closed
3/18/2012	9:14:32 PM	H2 valve closed
3/18/2012	9:14:32 PM	BCl3 valve closed
3/18/2012	9:14:32 PM	PH3 valve closed
3/18/2012	9:14:32 PM	SiCl4 pre valve closed
3/18/2012	9:14:32 PM	SiCl4 post valve closed
3/18/2012	9:14:32 PM	Bypass valve closed
3/18/2012	9:14:32 PM	Bubbler valve closed
3/18/2012	9:14:32 PM	Main Vac valve opened
3/18/2012	9:14:32 PM	Helium MFC set to  0.000000
3/18/2012	9:14:32 PM	H2 MFC set to  0.000000
3/18/2012	9:14:32 PM	BCl3 MFC set to  0.000000
3/18/2012	9:14:32 PM	PH3 MFC set to  0.000000
3/18/2012	9:14:32 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:14:32 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:14:33 PM	Tube furnace set to 0
3/18/2012	9:14:34 PM	Run finished at 9:14 PM
3/18/2012	9:14:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/18/2012	9:14:50 PM	Recipe started at 9:14 PM
3/18/2012	9:14:50 PM	Helium valve closed
3/18/2012	9:14:50 PM	H2 valve closed
3/18/2012	9:14:50 PM	BCl3 valve closed
3/18/2012	9:14:50 PM	PH3 valve closed
3/18/2012	9:14:50 PM	SiCl4 pre valve closed
3/18/2012	9:14:50 PM	SiCl4 post valve closed
3/18/2012	9:14:50 PM	Bypass valve closed
3/18/2012	9:14:50 PM	Bubbler valve closed
3/18/2012	9:14:50 PM	Main Vac valve opened
3/18/2012	9:14:50 PM	Helium MFC set to  0.000000
3/18/2012	9:14:50 PM	H2 MFC set to  0.000000
3/18/2012	9:14:50 PM	BCl3 MFC set to  0.000000
3/18/2012	9:14:50 PM	PH3 MFC set to  0.000000
3/18/2012	9:14:50 PM	SiCl4 MFC set to  0.000000
3/18/2012	9:14:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	9:14:50 PM	Tube furnace set to 0
3/18/2012	10:44:50 PM	Helium valve closed
3/18/2012	10:44:50 PM	H2 valve closed
3/18/2012	10:44:50 PM	BCl3 valve closed
3/18/2012	10:44:50 PM	PH3 valve closed
3/18/2012	10:44:50 PM	SiCl4 pre valve closed
3/18/2012	10:44:50 PM	SiCl4 post valve closed
3/18/2012	10:44:50 PM	Main Vac valve closed
3/18/2012	10:44:50 PM	Bypass valve closed
3/18/2012	10:44:50 PM	Bubbler valve closed
3/18/2012	10:44:50 PM	Helium MFC set to  0.000000
3/18/2012	10:44:50 PM	H2 MFC set to  0.000000
3/18/2012	10:44:50 PM	BCl3 MFC set to  0.000000
3/18/2012	10:44:50 PM	PH3 MFC set to  0.000000
3/18/2012	10:44:50 PM	SiCl4 MFC set to  0.000000
3/18/2012	10:44:50 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:44:50 PM	Tube furnace set to 0
3/18/2012	10:44:53 PM	Helium valve closed
3/18/2012	10:44:53 PM	BCl3 valve closed
3/18/2012	10:44:53 PM	PH3 valve closed
3/18/2012	10:44:53 PM	SiCl4 pre valve closed
3/18/2012	10:44:53 PM	SiCl4 post valve closed
3/18/2012	10:44:53 PM	Main Vac valve closed
3/18/2012	10:44:53 PM	Bypass valve closed
3/18/2012	10:44:53 PM	Bubbler valve closed
3/18/2012	10:44:53 PM	H2 valve opened
3/18/2012	10:44:53 PM	Helium MFC set to  0.000000
3/18/2012	10:44:53 PM	H2 MFC set to  500.000000
3/18/2012	10:44:53 PM	BCl3 MFC set to  0.000000
3/18/2012	10:44:53 PM	PH3 MFC set to  0.000000
3/18/2012	10:44:53 PM	SiCl4 MFC set to  0.000000
3/18/2012	10:44:53 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:44:53 PM	Tube furnace set to 0
3/18/2012	10:46:00 PM	Helium valve closed
3/18/2012	10:46:00 PM	BCl3 valve closed
3/18/2012	10:46:00 PM	PH3 valve closed
3/18/2012	10:46:00 PM	SiCl4 pre valve closed
3/18/2012	10:46:00 PM	SiCl4 post valve closed
3/18/2012	10:46:00 PM	Main Vac valve closed
3/18/2012	10:46:00 PM	Bypass valve closed
3/18/2012	10:46:00 PM	H2 valve opened
3/18/2012	10:46:00 PM	Bubbler valve opened
3/18/2012	10:46:00 PM	Helium MFC set to  0.000000
3/18/2012	10:46:00 PM	H2 MFC set to  500.000000
3/18/2012	10:46:00 PM	BCl3 MFC set to  0.000000
3/18/2012	10:46:00 PM	PH3 MFC set to  0.000000
3/18/2012	10:46:00 PM	SiCl4 MFC set to  0.000000
3/18/2012	10:46:00 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:46:00 PM	Tube furnace set to 0
3/18/2012	10:46:01 PM	Helium valve closed
3/18/2012	10:46:01 PM	BCl3 valve closed
3/18/2012	10:46:01 PM	PH3 valve closed
3/18/2012	10:46:01 PM	SiCl4 pre valve closed
3/18/2012	10:46:01 PM	SiCl4 post valve closed
3/18/2012	10:46:01 PM	Main Vac valve closed
3/18/2012	10:46:01 PM	Bypass valve closed
3/18/2012	10:46:01 PM	H2 valve opened
3/18/2012	10:46:01 PM	Bubbler valve opened
3/18/2012	10:46:01 PM	Helium MFC set to  0.000000
3/18/2012	10:46:01 PM	H2 MFC set to  500.000000
3/18/2012	10:46:01 PM	BCl3 MFC set to  0.000000
3/18/2012	10:46:01 PM	PH3 MFC set to  0.000000
3/18/2012	10:46:01 PM	SiCl4 MFC set to  0.000000
3/18/2012	10:46:01 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	10:46:01 PM	Tube furnace set to 1000
3/18/2012	11:11:01 PM	Helium valve closed
3/18/2012	11:11:01 PM	PH3 valve closed
3/18/2012	11:11:01 PM	Main Vac valve closed
3/18/2012	11:11:01 PM	Bypass valve closed
3/18/2012	11:11:01 PM	H2 valve opened
3/18/2012	11:11:01 PM	BCl3 valve opened
3/18/2012	11:11:01 PM	SiCl4 pre valve opened
3/18/2012	11:11:01 PM	SiCl4 post valve opened
3/18/2012	11:11:01 PM	Bubbler valve opened
3/18/2012	11:11:01 PM	Helium MFC set to  0.000000
3/18/2012	11:11:01 PM	H2 MFC set to  450.000000
3/18/2012	11:11:01 PM	BCl3 MFC set to  1.500000
3/18/2012	11:11:01 PM	PH3 MFC set to  0.000000
3/18/2012	11:11:01 PM	SiCl4 MFC set to  50.000000
3/18/2012	11:11:01 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	11:11:01 PM	Tube furnace set to 1000
3/18/2012	11:32:01 PM	Helium valve closed
3/18/2012	11:32:01 PM	BCl3 valve closed
3/18/2012	11:32:01 PM	PH3 valve closed
3/18/2012	11:32:01 PM	SiCl4 pre valve closed
3/18/2012	11:32:01 PM	SiCl4 post valve closed
3/18/2012	11:32:01 PM	Main Vac valve closed
3/18/2012	11:32:01 PM	Bypass valve closed
3/18/2012	11:32:01 PM	H2 valve opened
3/18/2012	11:32:01 PM	Bubbler valve opened
3/18/2012	11:32:01 PM	Helium MFC set to  0.000000
3/18/2012	11:32:01 PM	H2 MFC set to  500.000000
3/18/2012	11:32:01 PM	BCl3 MFC set to  0.000000
3/18/2012	11:32:01 PM	PH3 MFC set to  0.000000
3/18/2012	11:32:01 PM	SiCl4 MFC set to  0.000000
3/18/2012	11:32:01 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	11:32:02 PM	Tube furnace set to 750
3/18/2012	11:47:02 PM	H2 valve closed
3/18/2012	11:47:02 PM	BCl3 valve closed
3/18/2012	11:47:02 PM	PH3 valve closed
3/18/2012	11:47:02 PM	SiCl4 pre valve closed
3/18/2012	11:47:02 PM	SiCl4 post valve closed
3/18/2012	11:47:02 PM	Main Vac valve closed
3/18/2012	11:47:02 PM	Bypass valve closed
3/18/2012	11:47:02 PM	Helium valve opened
3/18/2012	11:47:02 PM	Bubbler valve opened
3/18/2012	11:47:02 PM	Helium MFC set to  500.000000
3/18/2012	11:47:02 PM	H2 MFC set to  0.000000
3/18/2012	11:47:02 PM	BCl3 MFC set to  0.000000
3/18/2012	11:47:02 PM	PH3 MFC set to  0.000000
3/18/2012	11:47:02 PM	SiCl4 MFC set to  0.000000
3/18/2012	11:47:02 PM	Bypass solenoid MFC set to  0.000000
3/18/2012	11:47:02 PM	Tube furnace set to 0
